EUV Light Source: Is the Future in a Particle Accelerator?

EUV Light Source: Is the Future in a Particle Accelerator?

As Intel, Samsung, TSMC, and Japan’s upcoming advanced foundry Rapiduseach make their separate preparations to cram more and more transistors into every square millimeter of silicon, one thing they all have in common is that the extreme ultraviolet (EUV) lithography technology underpinning their efforts is extremely complex, extremely expensive, and extremely costly to operate. A … Read more